MEMS thermal actuator
From Infogalactic: the planetary knowledge core
A MEMS thermal actuator is a micromechanical device that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped Single Crystal Silicon or Polysilicon as a complex compliant member, the increase in temperature can be achieved internally by electrical resistive heating or externally by a heat source capable of locally introducing heat. Microfabricated thermal actuators can be integrated into micromotors.[1][2]
Types of thermal actuators
Other types of MEMS Actuators
- Electrostatic — parallel plate or comb drive
- Magnetic
- Piezoelectric
- Thermostatic — linear motion, paraffin wax drive
References
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External links
- Vernatherm - Thermal Actuators - and other Thermostatic Fluid Controls - Rostra Vernatherm
- ThermalActuators.com - Thermal Actuators - & Mechanical Function Information & Products - Thermal Actuators
